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Paul Mertens

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 Better uniformity is probably the biggest benefit.

 Non-uniformity was not a big issue in the past. We typically cranked up the power until we got full removal. Now, however, we have fragile lines that easily damage. The major issue is non-uniformity, where you can have damage on one part of the wafer and zero particle removal efficiency on another part of the wafer.

 One concern is that the cleaning occurs at a certain angle, and you will not get symmetric cleaning on two sides of a trench.



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This website focuses on proverbs in the Swedish, Danish and Norwegian languages, and some parts including the links below have not been translated to English. They are mainly FAQs, various information and webpages for improving the collection.


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This website focuses on proverbs in the Swedish, Danish and Norwegian languages, and some parts including the links below have not been translated to English. They are mainly FAQs, various information and webpages for improving the collection.


Barnslighet är både skattebefriat och gratis!

Vad är proverb?
Hur funkar det?
Vanliga frågor
Om samlingen
Ordspråkshjältar
Hjälp till!




Inga kalorier, inget fett.

www.livet.se/proverb